Radio-Frequency Plasma Treatment and Thermal Annealing in Implanted Si Raman Study

This publication has 23 references indexed in Scilit:

• Influence of hydrogen on vibrational and optical properties of a-${\mathrm{Si}}_{1\mathrm{-}\mathrm{x}}$${\mathrm{H}}_{\mathrm{x}}$ alloys
  Physical Review B, 1987
• Hydrogen in crystalline semiconductors
  Applied Physics A, 1987
• Raman scattering from ion-implanted silicon
  Physical Review B, 1985
• Structural information from the Raman spectrum of amorphous silicon
  Physical Review B, 1985
• Characterization Of Amorphous And Polycrystalline Si and Ge Films
  Published by SPIE-Intl Soc Optical Eng ,1985
• RF plasma annealing of implanted MIS structures
  Physica Status Solidi (a), 1985
• Determination of energy barrier for structural relaxation in a-Si and a-Ge by Raman scattering
  Journal of Non-Crystalline Solids, 1984
• Multiphonon Raman Spectrum of Silicon
  Physical Review B, 1973
• Stress-Induced Shifts of First-Order Raman Frequencies of Diamond- and Zinc-Blende-Type Semiconductors
  Physical Review B, 1972
• Elastic Properties of ZnS Structure Semiconductors
  Physical Review B, 1970