Experimental and theoretical study of step coverage in metal-organic chemical vapor deposition of tantalum oxide thin films
- 1 January 1997
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 292 (1-2) , 324-329
- https://doi.org/10.1016/s0040-6090(96)09078-5
Abstract
No abstract availableKeywords
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