Relationship among reflectance-difference spectroscopy, surface photoabsorption, and spectroellipsometry
- 16 August 1993
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 63 (7) , 885-887
- https://doi.org/10.1063/1.109890
Abstract
From the reflectance expressions for a thin biaxial layer on an isotropic substrate we relate reflectance-difference spectroscopy (RDS), surface photoabsorption (SPA), and spectroellipsometry. Using these results and our recently acquired RD database, we determine surface reconstructions present during flow-modulated organometallic chemical vapor growth of epitaxial GaAs from SPA data that were published by others.Keywords
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