Low-voltage, 30 nm channel length, organic transistors with a self-assembled monolayer as gate insulating films
- 3 April 2000
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 76 (14) , 1941-1943
- https://doi.org/10.1063/1.126219
Abstract
We made nanometer-scale (gate length of 30 nm) organic thin-film transistors using a self-assembled monolayer (2 nm thick) as a gate insulator. The fabrication steps combine electron-beam lithography and lift-off techniques for the deposition of both metal electrodes and organic semiconductors with a chemical approach (self-assembly of organic molecules) to fabricate the gate insulator. Good performances of these transistors (with a record subthreshold slop of 350 mV/decade and a cutoff frequency of 20 kHz) and low-voltage operation (<2 V) are demonstrated down to a gate length of 200 nm. A gate voltage modulation of the source-to-drain tunnel current is demonstrated for the 30 nm gate length device.Keywords
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