Preparation of cubic boron nitride films by reactive sputtering from a boron carbide target
- 31 August 1996
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 5 (10) , 1130-1135
- https://doi.org/10.1016/0925-9635(96)00530-4
Abstract
No abstract availableKeywords
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