Evaluation of interstitial oxygen along striations in CZ silicon single crystals with a micro-FTIR mapping system
- 1 January 1992
- journal article
- Published by IOP Publishing in Semiconductor Science and Technology
- Vol. 7 (1A) , A304-A310
- https://doi.org/10.1088/0268-1242/7/1a/058
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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