Nanoscale FinFETs with gate-source/drain underlap
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- 27 December 2004
- journal article
- research article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 52 (1) , 56-62
- https://doi.org/10.1109/ted.2004.841333
Abstract
Using two-dimensional numerical device simulations, we show that optimally designed nanoscale FinFETs with undoped bodies require gate-source/drain (G-S/D) underlap that can be effectively achieved via large, doable straggle in the S-D fin-extension doping profile without causing S-D punch-through. The effective underlap significantly relaxes the fin-thickness requirement for control of short-channel effects (SCEs) via a bias-dependent effective channel length (L/sub eff/), which is long in weak inversion and approaches the gate length in strong inversion. Dependence of L/sub eff/ on the S/D doping profile defines a design tradeoff regarding SCEs and S/D series resistance that can be optimized, depending on the fin width, via engineering of the doping profile in the S/D fin-extensions. The noted optimization is exemplified via a well-tempered FinFET design with an 18-nm gate length, showing further that designs with effective underlap yield minimal parasitic capacitance and reduce leakage components such as gate-induced drain leakage current.Keywords
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