A single-mask substrate transfer technique for the fabrication of high-aspect-ratio micromachined structures
- 13 July 2007
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 17 (8) , 1575-1582
- https://doi.org/10.1088/0960-1317/17/8/021
Abstract
No abstract availableKeywords
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