Improved surface-micromachined hinges for fold-out structures
- 1 January 1998
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 7 (3) , 315-319
- https://doi.org/10.1109/84.709650
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
- Microelectromechanical Components For Articulated MicrorobotsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Impact-actuated linear microvibromotor for micro-optical systems on siliconPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Surface-micromachined components for articulated microrobotsJournal of Microelectromechanical Systems, 1996
- Surface-micromachined free-space fibre-optic switchesElectronics Letters, 1995
- Micromachined free-space integrated micro-opticsSensors and Actuators A: Physical, 1995
- Precision and performance of polysilicon micromirrors for hybrid integrated opticsPublished by SPIE-Intl Soc Optical Eng ,1995
- Optoelectronic packaging using silicon surface-micromachined alignment mirrorsIEEE Photonics Technology Letters, 1995
- Microfabricated hingesSensors and Actuators A: Physical, 1992
- Surface micromachining for microsensors and microactuatorsJournal of Vacuum Science & Technology B, 1988
- Integrated movable micromechanical structures for sensors and actuatorsIEEE Transactions on Electron Devices, 1988