Thermal effects of residual macrostress and microstrain in plasma-assisted CVD TiN films
- 18 June 1993
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 58 (1) , 37-43
- https://doi.org/10.1016/0257-8972(93)90172-k
Abstract
No abstract availableKeywords
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