Time and temperature dependence of instability mechanisms in amorphous silicon thin-film transistors

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Abstract
We have measured the time and temperature dependence of the two prominent instability mechanisms in amorphous silicon thin‐film transistors, namely, the creation of metastable states in the a‐Si:H and the charge trapping in the silicon nitride gate insulator. The state creation process shows a power law time dependence and is thermally activated. The charge trapping process shows a logarithmic time dependence and has a very small temperature dependence. The results for the state creation process are consistent with a model of Si dangling bond formation in the bulk a‐Si:H due to weak SiSi bond breaking stabilized by diffusive hydrogen motion. The logarithmic time dependence and weak temperature dependence for the charge trapping in the nitride suggest that the charge injection from the a‐Si:H to the nitride is the rate limiting step and not subsequent conduction in the nitride.