EPR spectroscopy of platinum-hydrogen complexes in silcon
- 15 May 1994
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 49 (19) , 13423-13429
- https://doi.org/10.1103/physrevb.49.13423
Abstract
Two similar defects in silicon, resulting from doping with platinum in an atmosphere containing water vapor, were studied by means of electron paramagnetic resonance. Both spectra have effective electron spin S=1/2, and exhibit platinum- and hydrogen-related hyperfine structure and remarkable behavior under band-gap illumination. One of the centers has been identified with the recently reported Pt- complex. Ligand hyperfine interaction and values of electron localization on two silicon neighbors and two protons have been measured and found to support the model of the Pt- center. The second spectrum, labeled Si-NL53, is also reported here. This spectrum has trigonal symmetry and displays hyperfine interactions with three equivalent platinum nuclei. Spin-Hamiltonian parameters of the spectrum were determined and the microscopic model of the defect is proposed. It has been concluded that annealing at high temperature in water-vapor atmosphere provides a high concentration of hydrogen in the bulk silicon and that it can be trapped there forming stable complexes with platinum.
Keywords
This publication has 14 references indexed in Scilit:
- Structure-sensitive spectroscopy of transition-metal-hydrogen complexes in siliconPhysical Review Letters, 1993
- Complexing in silicon induced by surface reactions: Electron paramagnetic resonance detection of a 6-platinum clusterJournal of Applied Physics, 1992
- Electron paramagnetic resonance of a platinum pair complex in siliconPhysical Review B, 1992
- Hydrogen in Crystalline SemiconductorsPublished by Springer Nature ,1992
- Passivation of shallow impurities in Si by annealing in H2 at high temperatureApplied Physics Letters, 1991
- Concentration of atomic hydrogen diffused into silicon in the temperature range 900–1300 °CApplied Physics Letters, 1991
- EPR observation of a platinum pair complex in SiPhysical Review B, 1988
- The diffusion of hydrogen in silicon and mechanisms for “unintentional” hydrogenation during ion beam processingJournal of Materials Research, 1987
- Palladium- and platinum-related levels in silicon: Effect of a hydrogen plasmaJournal of Applied Physics, 1983
- Spin Resonance of Pd and Pt in SiliconPhysical Review B, 1962