Some features of vacuum arc plasmas with increasing gas pressure in the discharge gap
- 24 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- Elevated ion charge states in vacuum arc plasmas in a magnetic fieldApplied Physics Letters, 1995
- Influence of gas added to the MEVVA discharge on the extracted ion beama)Review of Scientific Instruments, 1994
- Vacuum arc ion sourcesReview of Scientific Instruments, 1994
- Excitation, ionization, and reaction mechanism of a reactive cathodic arc deposition of TiNIEEE Transactions on Plasma Science, 1994
- Time dependence of vacuum arc parametersIEEE Transactions on Plasma Science, 1993
- The 100-kV gas and metal ion source for high current ion implantationReview of Scientific Instruments, 1992
- Some novel design features of the LBL metal vapor vacuum arc ion sourcesReview of Scientific Instruments, 1990
- Advances in metal ion sourcesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Improved time-of-flight ion charge state diagnosticReview of Scientific Instruments, 1987
- Metal vapor vacuum arc ion sourceReview of Scientific Instruments, 1986