Thermodynamic Analysis of InxGa1-xN Alloy Composition Grown by Metalorganic Vapor Phase Epitaxy
- 1 June 1996
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 35 (6A) , L673
- https://doi.org/10.1143/jjap.35.l673
Abstract
A thermodynamic analysis of alloy composition is described for metalorganic vapor phase epitaxy (MOVPE) of In x Ga1- x N. The vapor-solid distribution relationship is discussed in comparison with the experimental data reported in the literature. It is shown that the solid composition of In x Ga1- x N alloy grown by MOVPE is thermodynamically controlled. The origin of the deviation of the solid composition from the linear relation is also discussed.Keywords
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