Ion implantation model considering crystal structure effects
- 1 January 1990
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 37 (9) , 1959-1963
- https://doi.org/10.1109/16.57156
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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