A method of surface charge neutralization during ion implantation
- 1 January 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 21 (1) , 396-399
- https://doi.org/10.1016/0168-583x(87)90864-0
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Ion implantation electron flooding requirements from a user's perspectiveNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Diagnostic test for ion implantation dosimetryJournal of Vacuum Science and Technology, 1979
- Secondary particle collection in ion implantation dose measurementReview of Scientific Instruments, 1978
- Theory of the secondary electron avalanche at electrically stressed insulator-vacuum interfacesJournal of Applied Physics, 1977