Atomic force microscopy study of micrometric pattern replica by hot embossing lithography
- 1 May 2004
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 71 (3-4) , 272-276
- https://doi.org/10.1016/j.mee.2004.01.036
Abstract
No abstract availableKeywords
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