Coupled 3D thermo-electro-mechanical simulations of microactuators
- 23 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
We report 3D simulations of microactuators based on the solution of consistently coupled thermo-electro-mechanical equations. The necessary solution algorithms are implemented into the MEMS simulation environment SOLIDIS and allow efficient optimization studies of geometrically complex MEMS devices. Key issues are the solution of coupled equation systems using zone partitioning, adaptive mesh refinement, mesh updating using geometrical algorithms and field smoothing for the extraction of accurate electrostatic forces.Keywords
This publication has 10 references indexed in Scilit:
- Process-dependent Thermophysical Properties Of CMOS IC Thin FilmsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Double Pass Metallization For Cmos Aluminum ActuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Convergence properties of relaxation versus the surface-Newton generalized-conjugate residual algorithm for self-consistent electromechanical analysis of 3-D micro-electro-mechanical structuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- New convergence scheme for self-consistent electromechanical analysis of iMEMSPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Thermomechanical modeling of an actuated micromirrorSensors and Actuators A: Physical, 1995
- Thermally actuated CMOS micromirrorsSensors and Actuators A: Physical, 1995
- 3D coupled electro-mechanics for MEMS: applications of CoSolve-EMPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1995
- A simple error estimator and adaptive procedure for practical engineerng analysisInternational Journal for Numerical Methods in Engineering, 1987
- Adaptive zoning for singular problems in two dimensionsJournal of Computational Physics, 1982
- A non‐conforming element for stress analysisInternational Journal for Numerical Methods in Engineering, 1976