Microtexture and electromigration-induced drift in electroplated damascene Cu
- 15 March 2000
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 87 (6) , 2792-2802
- https://doi.org/10.1063/1.372258
Abstract
No abstract availableThis publication has 29 references indexed in Scilit:
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