Sputtering-induced surface roughness of metallic thin films
- 1 February 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 185 (1) , 79-90
- https://doi.org/10.1016/0040-6090(90)90008-2
Abstract
No abstract availableThis publication has 26 references indexed in Scilit:
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