MeV P implants in silicon: experiments and simulation
- 1 April 1992
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 67 (1-4) , 476-480
- https://doi.org/10.1016/0168-583x(92)95855-l
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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