Process-induced mechanical stress in isolation structures studied by micro-Raman spectroscopy
- 1 October 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 74 (7) , 4490-4500
- https://doi.org/10.1063/1.354365
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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