Determination of the centroid depths of the depth profiles of ion‐implanted analytes by angle‐resolved electron microbeam analysis
- 1 July 1990
- journal article
- Published by Wiley in Surface and Interface Analysis
- Vol. 16 (1-12) , 321-324
- https://doi.org/10.1002/sia.740160168
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Quantitative electron probe microanalysis using Gaussian ϕ(ρz) CurvesX-Ray Spectrometry, 1982
- Determination of the centroid depths of shallow impurity profiles by X‐ray fluorescence spectrometrySurface and Interface Analysis, 1981
- Theoretical Considerations on Lateral Spread of Implanted IonsJapanese Journal of Applied Physics, 1972