Study of defects in silicon after low energy H+ implantation by DLTS measurements
- 16 March 1987
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 100 (1) , 245-249
- https://doi.org/10.1002/pssa.2211000128
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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- Capacitance Transient SpectroscopyAnnual Review of Materials Science, 1977
- Substitutional doping of amorphous siliconSolid State Communications, 1975