UV laser-induced deposition of metal films
- 1 November 1980
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 37 (9) , 846-848
- https://doi.org/10.1063/1.92069
Abstract
KrF and XeCl excimer lasers have been used to induce the localized deposition of films of zinc and magnesium on a variety of transparent and absorbing substrates. The metal atoms are derived from flows of the pure metals. The films, which have thicknesses up to several microns, are produced only in the area of the substrate irradiated by the laser. It is hypothesized that UV radiation activates the substrate surface for film nucleation by desorbing species (e.g., hydrocarbons) which inhibit adhesion.Keywords
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