Abstract
This review paper presents the applications of X-ray diffraction to routine measurements and the procedures for extending its capabilities of analysis to undertake a detailed structural investigation of low-dimensional structures. The uses and limitations of the familiar double-crystal diffractometer are discussed as are the advantages of 'reciprocal space mapping' with a multiple-crystal diffractometer. In general X-ray diffraction has been used for composition and thickness measurement in low-dimensional structures (LDS) and these aspects are covered, as well as the avoidance of the pitfalls associated with their determination. The possibilities for the use of X-ray diffraction methods to determine interface quality, the evolution of lattice relaxation, the detailed microstructure, etc, are discussed, with an indication of the limits of the techniques.