Simulation and design of microsystems: a 10-year perspective
- 1 May 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 67 (1-3) , 1-7
- https://doi.org/10.1016/s0924-4247(97)01754-8
Abstract
No abstract availableKeywords
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