Emergent faces in crystal etching
- 1 March 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 3 (1) , 19-28
- https://doi.org/10.1109/84.285721
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
- Computer simulation of anisotropic crystal etchingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Anisotropic crystal etching: A simulation programSensors and Actuators A: Physical, 1992
- ASEP: a CAD program for silicon anisotropic etchingSensors and Actuators A: Physical, 1991
- Segment-based etch algorithm and modelingIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1991
- NH4Oh-based etchants for silicon micromachiningSensors and Actuators A: Physical, 1990
- Offsets of Two-Dimensional ProfilesIEEE Computer Graphics and Applications, 1984
- Use of Modified Free Energy Theorems to Predict Equilibrium Growing and Etching ShapesJournal of Applied Physics, 1962
- Orientation-Dependent Dissolution of GermaniumJournal of Applied Physics, 1960