Wear-out, breakdown occurrence and failure detection in 18–25 Å ultrathin oxides
- 1 July 2001
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 41 (7) , 1035-1039
- https://doi.org/10.1016/s0026-2714(01)00064-6
Abstract
No abstract availableKeywords
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