Real-time monitoring of laser ablation deposition of superconductors by fluorescence and secondary-ion spectra
- 26 December 1988
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 53 (26) , 2701-2703
- https://doi.org/10.1063/1.100550
Abstract
Fluorescence spectra and secondary-ion spectra for laser ablation of high-temperature metal-oxide superconductors are reported. These processes can be used to monitor a thin-film deposition process. The fluorescence spectra are more suitable for Y, Ba, and Ca ions. However, ion spectra can be used to monitor and identify Tl and Ca ions easier than by fluorescence spectra.Keywords
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