Electrostatically deflectable polysilicon torsional mirrors
- 31 July 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 44 (1) , 83-89
- https://doi.org/10.1016/0924-4247(94)00785-3
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
- Optical microshutters and torsional micromirrors for light modulator arraysPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Line-addressable torsional micromirrors for light modulator arraysSensors and Actuators A: Physical, 1994
- Piezoresistive accelerometer with overload protection and low cross-sensitivitySensors and Actuators A: Physical, 1993
- Process optimization of free-standing polysilicon microstructuresJournal of Micromechanics and Microengineering, 1992
- An ultrasensitive silicon pressure-based microflow sensorIEEE Transactions on Electron Devices, 1992
- Silicon pressure sensor with integrated bias stabilization and temperature compensationSensors and Actuators A: Physical, 1992
- Polycrystalline Silicon Micromechanical BeamsJournal of the Electrochemical Society, 1983
- 128 × 128 deformable mirror deviceIEEE Transactions on Electron Devices, 1983
- Silicon Torsional Scanning MirrorIBM Journal of Research and Development, 1980
- Dynamic micromechanics on silicon: Techniques and devicesIEEE Transactions on Electron Devices, 1978