In process ellipsometer azimuth angle calibration
- 1 December 1976
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 15 (12) , 3179-3184
- https://doi.org/10.1364/ao.15.003179
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 10 references indexed in Scilit:
- High Precision Alignment Procedure for an EllipsometerApplied Optics, 1974
- Effects of component imperfections on ellipsometer calibrationJournal of the Optical Society of America, 1973
- Calibration of Ellipsometer Divided Circles*Journal of the Optical Society of America, 1971
- Measurement and Correction of First-Order Errors in EllipsometryJournal of the Optical Society of America, 1971
- Unified Analysis of Ellipsometry Errors Due to Imperfect Components, Cell-Window Birefringence, and Incorrect Azimuth Angles*Journal of the Optical Society of America, 1971
- General Equations of Symmetrical Ellipsometer ArrangementsJournal of the Optical Society of America, 1970
- Analyses and Corrections of Instrumental Errors in EllipsometryJournal of the Optical Society of America, 1970
- Error analysis of angle of incidence measurementsSurface Science, 1969
- Definitions and conventions in ellipsometrySurface Science, 1969
- Ellipsometry Using a Retardation Plate as Compensator*Journal of the Optical Society of America, 1967