Three-Dimensional Integrated Circuit Technology

This publication has 7 references indexed in Scilit:

• Three-dimensional CMOS IC's Fabricated by using beam recrystallization
  IEEE Electron Device Letters, 1983
• A dynamic RAM Cell in recrystallized polysilicon
  IEEE Electron Device Letters, 1983
• Use of selective annealing for growing very large grain silicon on insulator films
  Applied Physics Letters, 1982
• Stacked MOSFET's in a single film of laser-recrystallized PolySilicon
  IEEE Electron Device Letters, 1982
• Recrystallization of Si on amorphous substrates by doughnut-shaped cw Ar laser beam
  Applied Physics Letters, 1982
• A high density CMOS inverter with stacked transistors
  IEEE Electron Device Letters, 1981
• One-gate-wide CMOS Inverter on laser-recrystallized polysilicon
  IEEE Electron Device Letters, 1980