Simple and Low Cost Patterning Process for Sputtered Pb(Zr,Ti)O3 Thin Films and Electrodes for Membrane-Based Microsystems Applications
- 1 January 2000
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Elaboration and characterization of PNZT thin films deposited on silicon by RF cathodic sputteringThe European Physical Journal Applied Physics, 2000
- Stress analysis at singular points of micromachined silicon membranesSensors and Actuators A: Physical, 2000
- Effect of clamping conditions and built-in stresses on the thermopneumatic deflection of SiO2/Si membranes with various geometriesSensors and Actuators A: Physical, 1999
- Compositional gradient in and mechanical stability of RF-sputtered and RTA annealed Pb(Zr,Ti)O3 thin filmsSensors and Actuators A: Physical, 1999
- A novel micromachined pump based on thick-film piezoelectric actuationSensors and Actuators A: Physical, 1998
- Hybrid-assembled micro dosing system using silicon-based micropump/ valve and mass flow sensorSensors and Actuators A: Physical, 1998
- Analysis of the stress and interfacial reactions in Pt/Ti/SiO2/Si for use with ferroelectric thin filmsJournal of Electronic Materials, 1998
- Static Characteristics of Piezoelectric Thin Film Buckling ActuatorJapanese Journal of Applied Physics, 1996
- Fluorine ion etching of lead zirconate-titanate thin filmsApplied Physics Letters, 1994
- Investigation of Pt/Ti bilayer metallization on silicon for ferroelectric thin film integrationJournal of Applied Physics, 1994