Effect of clamping conditions and built-in stresses on the thermopneumatic deflection of SiO2/Si membranes with various geometries
- 20 April 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 74 (1-3) , 174-177
- https://doi.org/10.1016/s0924-4247(98)00312-4
Abstract
No abstract availableKeywords
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