On the performance of the TRIM simulation for the evaluation of auger depth profiles
- 1 December 1998
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 26 (13) , 1001-1007
- https://doi.org/10.1002/(sici)1096-9918(199812)26:13<1001::aid-sia448>3.0.co;2-c
Abstract
No abstract availableKeywords
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