Investigation of the oxygen-related lattice defects in Czochralski silicon by means of electron microscopy techniques
- 16 November 1984
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 86 (1) , 245-261
- https://doi.org/10.1002/pssa.2210860126
Abstract
No abstract availableKeywords
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