Highly Oriented ZnO Films Prepared by MOCVD from Diethylzinc and Alcohols
- 1 December 1985
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 24 (12R) , 1607
- https://doi.org/10.1143/jjap.24.1607
Abstract
Alcohols have been shown to be useful as oxidizing agents of diethylzinc for the growth of ZnO films by MOCVD. C-axis oriented ZnO films have been deposited on glass substrates at 300°C. The problem of a premature reaction, which is observed between diethylzinc and oxygen or water vapor, is shown to be overcome when alcohols are used instead. The formation, stability and decomposition of the precursor of MOCVD, e.g., adducts, are discussed on the basis of a mass-spectroscopy analysis.Keywords
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