Low-temperature annealing of Al-implanted Si-SiO2 structures
- 16 August 1977
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 42 (2) , 639-645
- https://doi.org/10.1002/pssa.2210420228
Abstract
No abstract availableKeywords
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