AES and XPS characterization of SiN_x layers

This publication has 20 references indexed in Scilit:

• Quantitative XPS analysis of SiN_x(:H) films using simple methods without sputtering
  Surface and Interface Analysis, 1992
• Damage and recovery by electron and ion beam irradiation during AES analysis of silicon oxynitrides
  Surface and Interface Analysis, 1990
• Calculated and measured Auger lineshapes in clean Si(100)2×1, SiO_xand Si-NO
  Journal of Physics: Condensed Matter, 1989
• XPS characterization of ultrafine Si₃N₄ powders
  Surface and Interface Analysis, 1988
• X-ray photo-emission and Auger spectra of damage induced by Ar⁺-ion etching at SiO₂surfaces
  Journal of Physics D: Applied Physics, 1987
• On the Influence of Ar+ Ion Bombardment on the SiLVV Auger Line in Silicon Nitride Films
  Physica Status Solidi (a), 1986
• Electron and ion beam degradation effects in AES analysis of silicon nitride thin films
  Surface and Interface Analysis, 1985
• Relative differential subshell photoionisation cross-sections (MgKα) from lithium to uranium
  Journal of Electron Spectroscopy and Related Phenomena, 1978
• Surface Oxidation of Silicon Nitride Films
  Journal of the Electrochemical Society, 1976
• Relative intensities in photoelectron spectroscopy of atoms and molecules
  Journal of Electron Spectroscopy and Related Phenomena, 1976