Study of Cunand Cun+(n=1, 2, 3) cluster formation under ion bombardment

Abstract
Yields and energy spectra of neutral and charged particles sputtered from Cu target under 5.5 keV Ar+ ion bombardment have been measured. The yield of Cu n neutrals falls off rapidly with increasing n that can be explained by the recombination model. The yield of Cu n + ions depends unmonotonously on n. The ionization probability of sputtered particles is described by an exponential dependence exp[-(I n - ϕ)/∊0], where I n is the ionization potential of Cu n cluster, ϕ is the work function and ∊0 is a parameter.

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