Sputtering of Metals by Hydrogen Ions
- 1 February 1964
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 35 (2) , 322-326
- https://doi.org/10.1063/1.1713308
Abstract
Sputtering‐yield data for metals are obtained by drilling holes in thin target foils with magnetically separated, dense hydrogen beams. Results for H2+ and H3+ at 7 keV are presented for Be, Al, Ti, V, Fe, Co, Ni, Cu, Zr, Mo, Pd, Ag, Ta, W, Re, Ir, Pt, and Au. Results for protons can be inferred from those for molecular ions since the hydrogen atoms sputter independently. Typical results at 7 keV in atoms/ion are for 0.032/H2+, 0.046/H3+, and for Cu 0.025/H+, 0.065/H2+, and 0.105/H3+.This publication has 9 references indexed in Scilit:
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