Reactive Sputter Deposition of Superhard Polycrystalline Nanolayered Coatings
- 1 January 1996
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Model of superlattice yield stress and hardness enhancementsJournal of Applied Physics, 1995
- Reactive direct current magnetron sputtering of aluminum oxide coatingsJournal of Vacuum Science & Technology A, 1995
- Pulsed magnetron sputter technologySurface and Coatings Technology, 1993
- Aspects and results of long-term stable deposition of Al2O3 with high rate pulsed reactive magnetron sputteringSurface and Coatings Technology, 1993
- Reactive unbalanced magnetron sputter deposition of polycrystalline TiN/NbN superlattice coatingsSurface and Coatings Technology, 1993
- Deposition and properties of polycrystalline TiN/NbN superlattice coatingsJournal of Vacuum Science & Technology A, 1992
- Growth, structure, and microhardness of epitaxial TiN/NbN superlatticesJournal of Materials Research, 1992
- High rate reactive sputtering in an opposed cathode closed-field unbalanced magnetron sputtering systemSurface and Coatings Technology, 1990
- Growth of single-crystal TiN/VN strained-layer superlattices with extremely high mechanical hardnessJournal of Applied Physics, 1987