Real-time monitoring of Si1–xGex heteroepitaxial growth using laser light scattering and spectroscopic ellipsometry
- 16 November 1995
- journal article
- ellipsometry and-light-scattering
- Published by Wiley in Physica Status Solidi (a)
- Vol. 152 (1) , 95-102
- https://doi.org/10.1002/pssa.2211520110
Abstract
No abstract availableKeywords
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