Properties of Metalorganic Precursors for Chemical Vapor Deposition of Oxide Superconductors

Publisher Website
Google Scholar
Abstract
In an attempt to improve the reproducibility of chemical vapor deposition of YBaCuO films from metalorganic compounds, we have investigated some properties of several metal β-diketonates by means of thermogravimetric analysis and mass spectroscopy. The results suggest that Ba-compounds should be vaporized under a reduced pressure of as low as 1 Torr. The vaporizing temperature becomes 180°C, being separated from the decomposition temperature of 250°C. Mass spectra of several metal β-diketonates have been obtained for the first time by paying much attention to the vaporizing temperature and ionization voltage.