Spectroscopic ellipsometric study of boron nitride thin films
- 30 April 1996
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 5 (3-5) , 539-543
- https://doi.org/10.1016/0925-9635(96)80075-6
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
- Optical and structural characterization of boron nitride thin filmsDiamond and Related Materials, 1995
- Deposition and characterization of boron nitride thin filmsDiamond and Related Materials, 1994
- Preparation of cubic boron nitride films by low pressure inductively coupled plasma enhanced chemical vapor depositionApplied Physics Letters, 1994
- Ellipsometric study of boron nitride thin-film growth on Si(100)Applied Physics Letters, 1993
- Growth of cubic boron nitride from vapor phaseDiamond and Related Materials, 1992
- Ellipsometric study of diamond-like thin filmsSurface and Coatings Technology, 1991
- In situ optical characterizations for rf plasma deposited a-Si: H thin filmsVacuum, 1989
- Real time controlled rf reactor for deposition of a-Si:H thin filmsVacuum, 1989
- Structural characterization of boron nitride filmsJournal of Applied Physics, 1988
- Preparation, properties and applications of boron nitride thin filmsThin Solid Films, 1988