Preparation and Characterization of YBaCuO Superconducting Films by Low-Temperature Chemical Vapor Deposition Using β-Diketonate Complex and N2O

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Abstract
Low-temperature growth of YBa2Cu3O x superconducting films by chemical vapor deposition (CVD) has been investigated using dipivaloylmetanato (DPM) chelates of Y, Ba and Cu as starting materials and N2O as an oxidizing agent. YBa2Cu3O x structure has been prepared at a substrate temperature (T sub) of 530°C. Superconducting films with superconductive critical temperature (T c_onset) of 87 K and zero-resistivity critical temperature (T c_zero) of 15 K have been obtained at T sub=610°C and T c_onset=89 K, T c_zero=83 K at T sub=650°C. The relationship between surface morphology, chemical composition and superconductivity is discussed.