Crystallization behaviour of amorphous SiC films prepared by r.f. sputtering
- 17 August 1987
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 151 (3) , 403-412
- https://doi.org/10.1016/0040-6090(87)90139-8
Abstract
No abstract availableKeywords
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