Fixed charge and interface traps at heterovalent interfaces between Si(100) and non-crystalline Al2O3–Ta2O5 alloys
- 30 November 2001
- journal article
- conference paper
- Published by Elsevier in Microelectronic Engineering
- Vol. 59 (1-4) , 385-391
- https://doi.org/10.1016/s0167-9317(01)00673-6
Abstract
No abstract availableKeywords
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