Ion beam assisted deposition for metal finishing
- 1 February 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 37-38, 682-687
- https://doi.org/10.1016/0168-583x(89)90274-7
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
- Ion beam modification of TiN films during vapor depositionMaterials Science and Engineering, 1987
- Thick and homogeneous surface layers obtained by reactive ion-beam-enhanced depositionMaterials Science and Engineering, 1987
- The influence of platinum implantation on the hydrogen embrittlement of tantalumMaterials Science and Engineering, 1987
- An apparatus for combined vapor deposition and ion implantation to modify the surface properties of metalsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Properties of boron nitride coating films prepared by the ion beam and vapor deposition method (IVD)Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Bucket-type ion source for ion millingJournal of Vacuum Science & Technology A, 1986
- A new machine for metal surface treatment by dynamic mixing using a high current ion sourceJournal of Vacuum Science & Technology A, 1986
- Adherent TiN films produced by ion beam enhanced deposition at room temperatureNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Nitride film formation by ion and vapour depositionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- A new machine for film formation by ion and vapour depositionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985